Comparative Study of Switching Dynamics in Ferroelectric-based Capacitors with Different Design Options

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Francesco Driussi - , University of Udine (Author)
  • Enrico Rocco - , University of Udine (Author)
  • Marco Massarotto - , University of Udine (Author)
  • Suzanne Lancaster - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • David Esseni - , University of Udine (Author)

Abstract

Switching dynamics of ferroelectric (FE) based devices not only depend on the FE material but also on the design options available for the materials stack. However, the impact of the design of the material layers on the FE device properties is not fully understood yet. Here, we report a comprehensive characterization of Ferroelectric Tunnel Junctions based on Metal-Ferroelectric-Dielectric-Metal (MFDM) stacks and a full benchmark of the extracted parameters with those of Metal-Ferroelectric-Metal (MFM) capacitors. MFDM devices show an evident dependence of the extracted coercive voltages on the thickness of the dielectric layer (DE), as well as on the frequency of the signal used to characterize the device, which is not observed in MFM stacks. Finally, the remnant polarization measured in MFDM stacks is lower than in MFM samples. Together, all these evidences suggest that the traps at the FE-DE interface play a fundamental role in the switching dynamics of the device and in the extraction of the ferroelectric parameters.

Details

Original languageEnglish
Title of host publicationICMTS 2025 - Proceedings of the 2025 IEEE 37th International Conference on Microelectronic Test Structures, ICMTS 2025
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages5
ISBN (electronic)979-8-3315-3169-0
Publication statusPublished - 2025
Peer-reviewedYes

Publication series

SeriesIEEE International Conference on Microelectronic Test Structures
ISSN1071-9032

Conference

Title37th IEEE International Conference on Microelectronic Test Structures
Abbreviated titleICMTS 2025
Conference number37
Duration24 - 27 March 2025
LocationThe Historic Menger Hotel
CitySan Antonio
CountryUnited States of America

External IDs

ORCID /0000-0003-3814-0378/work/191039704

Keywords

ASJC Scopus subject areas