Comparative Study of Switching Dynamics in Ferroelectric-based Capacitors with Different Design Options

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Francesco Driussi - , Università degli Studi di Udine (Autor:in)
  • Enrico Rocco - , Università degli Studi di Udine (Autor:in)
  • Marco Massarotto - , Università degli Studi di Udine (Autor:in)
  • Suzanne Lancaster - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • David Esseni - , Università degli Studi di Udine (Autor:in)

Abstract

Switching dynamics of ferroelectric (FE) based devices not only depend on the FE material but also on the design options available for the materials stack. However, the impact of the design of the material layers on the FE device properties is not fully understood yet. Here, we report a comprehensive characterization of Ferroelectric Tunnel Junctions based on Metal-Ferroelectric-Dielectric-Metal (MFDM) stacks and a full benchmark of the extracted parameters with those of Metal-Ferroelectric-Metal (MFM) capacitors. MFDM devices show an evident dependence of the extracted coercive voltages on the thickness of the dielectric layer (DE), as well as on the frequency of the signal used to characterize the device, which is not observed in MFM stacks. Finally, the remnant polarization measured in MFDM stacks is lower than in MFM samples. Together, all these evidences suggest that the traps at the FE-DE interface play a fundamental role in the switching dynamics of the device and in the extraction of the ferroelectric parameters.

Details

OriginalspracheEnglisch
TitelICMTS 2025 - Proceedings of the 2025 IEEE 37th International Conference on Microelectronic Test Structures, ICMTS 2025
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
Seitenumfang5
ISBN (elektronisch)979-8-3315-3169-0
PublikationsstatusVeröffentlicht - 2025
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE International Conference on Microelectronic Test Structures
ISSN1071-9032

Konferenz

Titel37th IEEE International Conference on Microelectronic Test Structures
KurztitelICMTS 2025
Veranstaltungsnummer37
Dauer24 - 27 März 2025
OrtThe Historic Menger Hotel
StadtSan Antonio
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0003-3814-0378/work/191039704

Schlagworte

ASJC Scopus Sachgebiete