Comparative study of ITO and TiN fabricated by low-temperature RF biased sputtering
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Details
| Original language | English |
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| Article number | 021503 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 34 |
| Issue number | 2 |
| Publication status | Published - 2016 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 84948665821 |
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