Characterization of Embedded and Thinned RF Chips
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
This work studies the effect of thinning down chips with transmission line structures for flexible embedding technology. Test chips with 90 Ω grounded coplanar waveguide (G-CPW) transmission lines have been designed and manufactured to characterize the high-frequency performance before and after embedding in sheet molding compound (SMC), and thinning down from 300 µm to 20 µm, Molding first technology enables single-die or multiple-die thinning with the embedding material while being held in the exact position, where the subsequent fan-out copper (Cu) redistribution layer (RDL) structuring realizes the direct contacts to the embedded chip, followed by semi-additive manufacturing of traces. The embedded and thinned chips are characterized by S-parameter measurements in the frequency range from 20 MHz to 65 GHz using a vector network analyzer (VNA). The results show the feasibility of the examined embedding and thinning processes which are suitable for millimeter wave (mmWave) components as shown by the example of a G-CPW transmission line without degrading its RF performance in terms of characteristic impedance and attenuation.
Details
Original language | English |
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Title of host publication | 2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC) |
Publisher | IEEE |
Pages | 1-6 |
Number of pages | 6 |
ISBN (electronic) | 9780956808691 |
ISBN (print) | 978-1-6654-8736-8 |
Publication status | Published - 14 Sept 2023 |
Peer-reviewed | Yes |
Conference
Title | 2023 24th European Microelectronics and Packaging Conference & Exhibition |
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Subtitle | What future do you want to connect with? |
Abbreviated title | EMPC 2023 |
Conference number | 24 |
Duration | 11 - 14 September 2023 |
Website | |
Degree of recognition | International event |
Location | Wellcome Genome Campus |
City | Hinxton |
Country | United Kingdom |
External IDs
Scopus | 85186139775 |
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ORCID | /0000-0001-6778-7846/work/155291624 |
ORCID | /0000-0003-1319-0870/work/155292029 |
ORCID | /0000-0002-0757-3325/work/155292325 |
ORCID | /0000-0003-2197-6080/work/155292463 |
Keywords
Keywords
- Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements