Characterization of Embedded and Thinned RF Chips
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
This work studies the effect of thinning down chips with transmission line structures for flexible embedding technology. Test chips with 90 Ω grounded coplanar waveguide (G-CPW) transmission lines have been designed and manufactured to characterize the high-frequency performance before and after embedding in sheet molding compound (SMC), and thinning down from 300 µm to 20 µm, Molding first technology enables single-die or multiple-die thinning with the embedding material while being held in the exact position, where the subsequent fan-out copper (Cu) redistribution layer (RDL) structuring realizes the direct contacts to the embedded chip, followed by semi-additive manufacturing of traces. The embedded and thinned chips are characterized by S-parameter measurements in the frequency range from 20 MHz to 65 GHz using a vector network analyzer (VNA). The results show the feasibility of the examined embedding and thinning processes which are suitable for millimeter wave (mmWave) components as shown by the example of a G-CPW transmission line without degrading its RF performance in terms of characteristic impedance and attenuation.
Details
| Original language | English |
|---|---|
| Title of host publication | 24th European Microelectronics and Packaging Conference, EMPC 2023 |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Number of pages | 6 |
| ISBN (electronic) | 978-0-9568086-9-1 |
| ISBN (print) | 978-1-6654-8736-8 |
| Publication status | Published - 14 Sept 2023 |
| Peer-reviewed | Yes |
Conference
| Title | 24th European Microelectronics and Packaging Conference & Exhibition |
|---|---|
| Subtitle | What future do you want to connect with? |
| Abbreviated title | EMPC 2023 |
| Conference number | 24 |
| Duration | 11 - 14 September 2023 |
| Website | |
| Degree of recognition | International event |
| Location | Wellcome Genome Campus |
| City | Hinxton |
| Country | United Kingdom |
External IDs
| Scopus | 85186139775 |
|---|---|
| ORCID | /0000-0001-6778-7846/work/155291624 |
| ORCID | /0000-0003-1319-0870/work/155292029 |
| ORCID | /0000-0002-0757-3325/work/155292325 |
| ORCID | /0000-0003-2197-6080/work/155292463 |
| ORCID | /0000-0001-9720-0727/work/192581583 |
Keywords
ASJC Scopus subject areas
- Electrical and Electronic Engineering - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Safety, Risk, Reliability and Quality - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Electronic, Optical and Magnetic Materials - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Polymers and Plastics - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Instrumentation - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
Keywords
- Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line