Characterization of Embedded and Thinned RF Chips

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Abstract

This work studies the effect of thinning down chips with transmission line structures for flexible embedding technology. Test chips with 90 Ω grounded coplanar waveguide (G-CPW) transmission lines have been designed and manufactured to characterize the high-frequency performance before and after embedding in sheet molding compound (SMC), and thinning down from 300 µm to 20 µm, Molding first technology enables single-die or multiple-die thinning with the embedding material while being held in the exact position, where the subsequent fan-out copper (Cu) redistribution layer (RDL) structuring realizes the direct contacts to the embedded chip, followed by semi-additive manufacturing of traces. The embedded and thinned chips are characterized by S-parameter measurements in the frequency range from 20 MHz to 65 GHz using a vector network analyzer (VNA). The results show the feasibility of the examined embedding and thinning processes which are suitable for millimeter wave (mmWave) components as shown by the example of a G-CPW transmission line without degrading its RF performance in terms of characteristic impedance and attenuation.

Details

Original languageEnglish
Title of host publication24th European Microelectronics and Packaging Conference, EMPC 2023
PublisherIEEE
Pages1-6
Number of pages6
ISBN (electronic)9780956808691
ISBN (print)978-1-6654-8736-8
Publication statusPublished - 14 Sept 2023
Peer-reviewedYes

Conference

Title2023 24th European Microelectronics and Packaging Conference & Exhibition
SubtitleWhat future do you want to connect with?
Abbreviated titleEMPC 2023
Conference number24
Duration11 - 14 September 2023
Website
Degree of recognitionInternational event
LocationWellcome Genome Campus
CityHinxton
CountryUnited Kingdom

External IDs

Scopus 85186139775
ORCID /0000-0001-6778-7846/work/155291624
ORCID /0000-0003-1319-0870/work/155292029
ORCID /0000-0002-0757-3325/work/155292325
ORCID /0000-0003-2197-6080/work/155292463

Keywords

Keywords

  • Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line