Characterization of Embedded and Thinned RF Chips

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Abstract

This work studies the effect of thinning down chips with transmission line structures for flexible embedding technology. Test chips with 90 Ω grounded coplanar waveguide (G-CPW) transmission lines have been designed and manufactured to characterize the high-frequency performance before and after embedding in sheet molding compound (SMC), and thinning down from 300 µm to 20 µm, Molding first technology enables single-die or multiple-die thinning with the embedding material while being held in the exact position, where the subsequent fan-out copper (Cu) redistribution layer (RDL) structuring realizes the direct contacts to the embedded chip, followed by semi-additive manufacturing of traces. The embedded and thinned chips are characterized by S-parameter measurements in the frequency range from 20 MHz to 65 GHz using a vector network analyzer (VNA). The results show the feasibility of the examined embedding and thinning processes which are suitable for millimeter wave (mmWave) components as shown by the example of a G-CPW transmission line without degrading its RF performance in terms of characteristic impedance and attenuation.

Details

OriginalspracheEnglisch
Titel24th European Microelectronics and Packaging Conference, EMPC 2023
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
Seiten1-6
Seitenumfang6
ISBN (elektronisch)9780956808691
ISBN (Print)978-1-6654-8736-8
PublikationsstatusVeröffentlicht - 14 Sept. 2023
Peer-Review-StatusJa

Konferenz

Titel2023 24th European Microelectronics and Packaging Conference & Exhibition
UntertitelWhat future do you want to connect with?
KurztitelEMPC 2023
Veranstaltungsnummer24
Dauer11 - 14 September 2023
Webseite
BekanntheitsgradInternationale Veranstaltung
OrtWellcome Genome Campus
StadtHinxton
LandGroßbritannien/Vereinigtes Königreich

Externe IDs

Scopus 85186139775
ORCID /0000-0001-6778-7846/work/155291624
ORCID /0000-0003-1319-0870/work/155292029
ORCID /0000-0002-0757-3325/work/155292325
ORCID /0000-0003-2197-6080/work/155292463
ORCID /0000-0001-9720-0727/work/192581583

Schlagworte

Schlagwörter

  • Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line