Characterization of Embedded and Thinned RF Chips
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
This work studies the effect of thinning down chips with transmission line structures for flexible embedding technology. Test chips with 90 Ω grounded coplanar waveguide (G-CPW) transmission lines have been designed and manufactured to characterize the high-frequency performance before and after embedding in sheet molding compound (SMC), and thinning down from 300 µm to 20 µm, Molding first technology enables single-die or multiple-die thinning with the embedding material while being held in the exact position, where the subsequent fan-out copper (Cu) redistribution layer (RDL) structuring realizes the direct contacts to the embedded chip, followed by semi-additive manufacturing of traces. The embedded and thinned chips are characterized by S-parameter measurements in the frequency range from 20 MHz to 65 GHz using a vector network analyzer (VNA). The results show the feasibility of the examined embedding and thinning processes which are suitable for millimeter wave (mmWave) components as shown by the example of a G-CPW transmission line without degrading its RF performance in terms of characteristic impedance and attenuation.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 24th European Microelectronics and Packaging Conference, EMPC 2023 |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers (IEEE) |
| Seitenumfang | 6 |
| ISBN (elektronisch) | 978-0-9568086-9-1 |
| ISBN (Print) | 978-1-6654-8736-8 |
| Publikationsstatus | Veröffentlicht - 14 Sept. 2023 |
| Peer-Review-Status | Ja |
Konferenz
| Titel | 24th European Microelectronics and Packaging Conference & Exhibition |
|---|---|
| Untertitel | What future do you want to connect with? |
| Kurztitel | EMPC 2023 |
| Veranstaltungsnummer | 24 |
| Dauer | 11 - 14 September 2023 |
| Webseite | |
| Bekanntheitsgrad | Internationale Veranstaltung |
| Ort | Wellcome Genome Campus |
| Stadt | Hinxton |
| Land | Großbritannien/Vereinigtes Königreich |
Externe IDs
| Scopus | 85186139775 |
|---|---|
| ORCID | /0000-0001-6778-7846/work/155291624 |
| ORCID | /0000-0003-1319-0870/work/155292029 |
| ORCID | /0000-0002-0757-3325/work/155292325 |
| ORCID | /0000-0003-2197-6080/work/155292463 |
| ORCID | /0000-0001-9720-0727/work/192581583 |
Schlagworte
ASJC Scopus Sachgebiete
- Elektrotechnik und Elektronik - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Sicherheit, Risiko, Zuverlässigkeit und Qualität - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Elektronische, optische und magnetische Materialien - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Polymere und Kunststoffe - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
- Instrumentierung - Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line
Schlagwörter
- Frequency measurement, Radio frequency, Scattering parameters, Semiconductor device measurement, Sensor phenomena and characterization, Thermomechanical processes, Transmission line measurements, chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line