Bipolar conductivity in ferroelectric La:HfZrO films
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Lanthanum-doped HfZrO is considered as the ferroelectric material for capacitor structures used in one-transistor-one capacitor nonvolatile memory cells for the development of new generation nonvolatile random-access memory. Here, different capacitor structures are characterized by x-ray photoelectron spectroscopy electrically to determine the electron and hole contribution to the conductivity in these capacitor structures. Experiments related to the minority carrier's injection and charge transport from an n-Si and a p-Si substrate into a lanthanum-doped HfZrO layer show that the conductivity is bipolar. Electrons are injected into La:HfZrO from a negatively biased contact, and accordingly, holes are injected from a positive voltage biased electrode.
Details
| Original language | English |
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| Article number | 262903 |
| Journal | Applied physics letters |
| Volume | 118 |
| Issue number | 26 |
| Publication status | Published - 28 Jun 2021 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 85109140939 |
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