Bipolar conductivity in ferroelectric La:HfZrO films
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Lanthanum-doped HfZrO is considered as the ferroelectric material for capacitor structures used in one-transistor-one capacitor nonvolatile memory cells for the development of new generation nonvolatile random-access memory. Here, different capacitor structures are characterized by x-ray photoelectron spectroscopy electrically to determine the electron and hole contribution to the conductivity in these capacitor structures. Experiments related to the minority carrier's injection and charge transport from an n-Si and a p-Si substrate into a lanthanum-doped HfZrO layer show that the conductivity is bipolar. Electrons are injected into La:HfZrO from a negatively biased contact, and accordingly, holes are injected from a positive voltage biased electrode.
Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 262903 |
| Fachzeitschrift | Applied physics letters |
| Jahrgang | 118 |
| Ausgabenummer | 26 |
| Publikationsstatus | Veröffentlicht - 28 Juni 2021 |
| Peer-Review-Status | Ja |
Externe IDs
| Scopus | 85109140939 |
|---|