A Study of Gallium FIB induced Silicon Amorphization using TEM, APT and BCA Simulation

Research output: Contribution to journal › Research article › Contributed › peer-review

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Original languageEnglish
Pages (from-to)1839-1840
Number of pages2
JournalMicroscopy and microanalysis
Volume21
Issue numberS3
Publication statusPublished - 2015
Peer-reviewedYes

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