A Study of Gallium FIB induced Silicon Amorphization using TEM, APT and BCA Simulation
Research output: Contribution to journal › Research article › Contributed › peer-review
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Original language | English |
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Pages (from-to) | 1839-1840 |
Number of pages | 2 |
Journal | Microscopy and microanalysis |
Volume | 21 |
Issue number | S3 |
Publication status | Published - 2015 |
Peer-reviewed | Yes |