A mathematical model for the external scheduling of a cluster tool workstation

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Contributors

Abstract

Cluster tools are closed mini production environments that are especially used in the semiconductor industry. They consist of multiple processing chambers. In contrast to single processing tools they can handle multiple lots with different process characteristics at the same time. The major challenge for scheduling cluster tools is the hard to predict process times of even comparable lots as they strongly depend on a changing product mix over the tool. In this paper a mathematical model for the external scheduling of a cluster tool workstation is presented. The goal is to minimize the weighted cycle time by accounting for the changing cycle times of each lot. A MIP model assigns lots to tools of a workstation and determines for each lot the chambers, which are used during the processing steps inside the cluster tool. Finally the developed method is compared with a simulation that uses dispatching strategies.

Details

Original languageEnglish
Title of host publicationWSC 2018 - 2018 Winter Simulation Conference
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages3538-3549
Number of pages12
ISBN (electronic)9781538665725
Publication statusPublished - 31 Jan 2019
Peer-reviewedYes

Publication series

SeriesProceedings - Winter Simulation Conference
Volume2018-December
ISSN0891-7736

Conference

TitleWinter Simulation Conference 2018
Abbreviated titleWSC 2018
Duration9 - 12 December 2018
Degree of recognitionInternational event
CityGöteborg
CountrySweden

External IDs

ORCID /0000-0002-0757-3325/work/139064797