A FeFET with a novel MFMFIS gate stack: Towards energy-efficient and ultrafast NVMs for neuromorphic computing

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Tarek Ali - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Konstantin Mertens - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Kati Kühnel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Matthias Rudolph - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Sebastian Oehler - , Fraunhofer Institute for Photonic Microsystems (Author)
  • David Lehninger - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Franz Müller - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Ricardo Revello - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Raik Hoffmann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Katrin Zimmermann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Kämpfe - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Malte Czernohorsky - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Jan van Houdt - , Interuniversitair Micro-Elektronica Centrum, KU Leuven (Author)
  • Lukas M. Eng - , Clusters of Excellence ct.qmat: Complexity and Topology in Quantum Matter, Chair of Experimental Physics / Photophysics, TUD Dresden University of Technology (Author)

Abstract

The discovery of ferroelectricity in the fluorite structure based hafnium oxide (HfO2) material sparked major efforts for reviving the ferroelectric field effect transistor (FeFET) memory concept. A Novel metal-ferroelectric-metal-ferroelectric-insulator-semiconductor (MFMFIS) FeFET memory is reported based on dual ferroelectric integration as an MFM and MFIS in a single gate stack using Si-doped Hafnium oxide (HSO) ferroelectric (FE) material. The MFMFIS top and bottom electrode contacts, dual HSO based ferroelectric layers, and tailored MFM to MFIS area ratio (AR-TB) provide a flexible stack structure tuning for improving the FeFET performance. The AR-TB tuning shows a tradeoff between the MFM voltage increase and the weaker FET Si channel inversion, particularly notable in the drain saturation current ID(sat) when the AR-TB ratio decreases. Dual HSO ferroelectric layer integration enables a maximized memory window (MW) and dynamic control of its size by tuning the MFM to MFIS switching contribution through the AR-TB change. The stack structure control via the AR-TB tuning shows further merits in terms of a low voltage switching for a saturated MW size, an extremely linear at wide dynamic range of the current update, as well as high symmetry in the long term synaptic potentiation and depression. The MFMFIS stack reliability is reported in terms of the switching variability, temperature dependence, endurance, and retention. The MFMFIS concept is thoroughly discussed revealing profound insights on the optimal MFMFIS stack structure control for enhancing the FeFET memory performance.

Details

Original languageEnglish
Article number425201
JournalNanotechnology
Volume32
Issue number42
Early online date29 Jul 2021
Publication statusPublished - 15 Oct 2021
Peer-reviewedYes

External IDs

PubMed 34261048
ORCID /0000-0002-2484-4158/work/142257587

Keywords

Keywords

  • FeFET, Ferroelectric, Hafnium oxide, MFMFIS, Neuromorphic, Synaptic device