3D Microscopy and Microanalysis of Au-Al Ultrasonic Bonds by Specific Ion Beam Processing Steps and Scanning Electron Microscopy

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Wolfgang Hauffe - , TUD Dresden University of Technology (Author)
  • A Bochenek - , Faculty of Microsystems Electronics and Photonics, Wrocław University of Science and Technology (Author)
  • M Lukaszewicz - , Wrocław University of Science and Technology (Author)
  • Enrico Langer - , Chair of Microsystems, Chair of Microstructure Physics (Author)
  • R. J. Mitro - , Gatan, Inc (Author)

Details

Original languageEnglish
Pages (from-to)1156-1157
Number of pages2
JournalMicroscopy and microanalysis
Volume10
Issue numberSuppl. 2
Publication statusPublished - 2004
Peer-reviewedYes

External IDs

Scopus 4544299640

Keywords