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Research Portal of the TU Dresden

Micro and Nano Engineering

ISSNs: 2590-0072

Elsevier Science B.V., Netherlands

Scopus rating (2025): CiteScore 6.8 SJR 0.651 SNIP 0.958

Indexed in DOAJ

Journal

Titles	Micro and Nano Engineering
ISSNs	2590-0072
Publisher	Elsevier Science B.V.
Country/Territory	Netherlands
Scopus ID	21100897164
ZDB-ID	2965612-6

Keywords

ASJC Scopus subject areas

Library keywords

620 Engineering and allied operations

Related content

Research output

Mitigating the degradation of metal–semiconductor contacts with optimized electron beam evaporation

Frahm, T., Liebisch, P., Heiß, J., Ingebrandt, S. & Knoch, J., Sept 2026, In: Micro and Nano Engineering. 32, 100368.

Research output: Contribution to journal › Research article › Contributed › peer-review

2D BDiode – A switchable bidirectional diode for analog electronic circuits fabricated entirely from 2D materials

Matthus, C. D., Chava, P., Watanabe, K., Taniguchi, T., Mikolajick, T. & Erbe, A., Jun 2024, In: Micro and Nano Engineering. 23 (2024), 9 p., 100246.

Research output: Contribution to journal › Research article › Contributed › peer-review

Fabrication of switchable biocompatible, nano-fluidic devices using a thermoresponsive polymer on nano-patterned surfaces

Bickmann, C., Meinecke, C., Korten, T., Sekulla, H., Helke, C., Blaudeck, T. & Reuter, D. & 1 others, Schulz, S. E., Jun 2024, In: Micro and Nano Engineering. 23, 100265.

Research output: Contribution to journal › Research article › Contributed › peer-review

Dry release of MEMS origami using thin Al₂O₃ films for facet-based device integration

Zhang, J., Reif, J., Strobel, C., Chava, P., Erbe, A., Voigt, A. & Mikolajick, T. & 1 others, Kirchner, R., Jun 2023, In: Micro and Nano Engineering. 19, 8 p., 100179.

Research output: Contribution to journal › Research article › Contributed › peer-review

Low-temperature ALD process development of 200 mm wafer-scale MoS₂ for gas sensing application

Neubieser, R. M., Wree, J. L., Jagosz, J., Becher, M., Ostendorf, A., Devi, A. & Bock, C. & 2 others, Michel, M. & Grabmaier, A., Jun 2022, In: Micro and Nano Engineering. 15, 100126.

Research output: Contribution to journal › Research article › Contributed › peer-review

View all research output (5)