X-Ray White Beam Interferences on Thin Crystals

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

Results of white beam X-ray interference measurements on almost perfect semiconductor wafers are presented. A specific measurement geometry allows for the investigation of diffraction effects on thin wafers down to at least 375 µm with a simple experimental setup (standard lab CT with microfocus X-ray tube). Furthermore, the dynamic diffraction effect of double refraction has been studied in detail for thicker samples. This might lead to a new wafer testing method as the observed dynamic effects are very sensible on crystal quality.

Details

Original languageEnglish
Article number2100085
Number of pages7
JournalCrystal Research and Technology
Volume56
Issue number10
Early online date6 Aug 2021
Publication statusPublished - Oct 2021
Peer-reviewedYes

External IDs

Scopus 85111817961

Keywords

Keywords

  • X-ray diffraction, X-ray inspection, wafer testing, white beam interferences