X-Ray White Beam Interferences on Thin Crystals
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Results of white beam X-ray interference measurements on almost perfect semiconductor wafers are presented. A specific measurement geometry allows for the investigation of diffraction effects on thin wafers down to at least 375 µm with a simple experimental setup (standard lab CT with microfocus X-ray tube). Furthermore, the dynamic diffraction effect of double refraction has been studied in detail for thicker samples. This might lead to a new wafer testing method as the observed dynamic effects are very sensible on crystal quality.
Details
| Original language | English |
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| Article number | 2100085 |
| Number of pages | 7 |
| Journal | Crystal Research and Technology |
| Volume | 56 |
| Issue number | 10 |
| Early online date | 6 Aug 2021 |
| Publication status | Published - Oct 2021 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 85111817961 |
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Keywords
ASJC Scopus subject areas
Keywords
- X-ray diffraction, X-ray inspection, wafer testing, white beam interferences