Wavelength-selective 4H-SiC UV-sensor array

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Christian D. Matthus - , Fraunhofer Institute for Integrated Systems and Device Technology (Author)
  • Anton J. Bauer - (Author)
  • Lothar Frey - (Author)
  • Tobias Erlbacher - (Author)

Abstract

In this work, monolithically integrated wavelength-selective 4H-SiC UV-sensor arrays were manufactured using two photolithography masks and only one implantation sequence demonstrating the potential of the advanced 4H-SiC process technology for the first time. The process technology is described in detail for the fabrication of a 2 × 2 wavelength-sensitive UV-sensor array including two variants with different thicknesses of the p-emitter. The maximum spectral responsivity is 92 mA/W for a wavelength of 300 nm and the devices with a thick p-emitter and 162 mA/W for a wavelength of 290 nm and devices with the thin p-emitter. The corresponding values of the external quantum efficiency are 38%, and 69%, respectively. Furthermore, another UV-sensor characteristic is found evaluating the current difference between both types with a maximum spectral responsivity of 80.2 mA/W at a wavelength of 270 nm.

Details

Original languageEnglish
Pages (from-to)205-211
Number of pages7
JournalMaterials science in semiconductor processing
Volume90
Publication statusPublished - 2019
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 85055657990

Keywords

Keywords

  • 4H-SiC pin-diode, Ion implantation, Photodiode, UV sensor, Wavelength-selective