Wavelength-selective 4H-SiC UV-sensor array

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Christian D. Matthus - , Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (Autor:in)
  • Anton J. Bauer - (Autor:in)
  • Lothar Frey - (Autor:in)
  • Tobias Erlbacher - (Autor:in)

Abstract

In this work, monolithically integrated wavelength-selective 4H-SiC UV-sensor arrays were manufactured using two photolithography masks and only one implantation sequence demonstrating the potential of the advanced 4H-SiC process technology for the first time. The process technology is described in detail for the fabrication of a 2 × 2 wavelength-sensitive UV-sensor array including two variants with different thicknesses of the p-emitter. The maximum spectral responsivity is 92 mA/W for a wavelength of 300 nm and the devices with a thick p-emitter and 162 mA/W for a wavelength of 290 nm and devices with the thin p-emitter. The corresponding values of the external quantum efficiency are 38%, and 69%, respectively. Furthermore, another UV-sensor characteristic is found evaluating the current difference between both types with a maximum spectral responsivity of 80.2 mA/W at a wavelength of 270 nm.

Details

OriginalspracheEnglisch
Seiten (von - bis)205-211
Seitenumfang7
FachzeitschriftMaterials science in semiconductor processing
Jahrgang90
PublikationsstatusVeröffentlicht - 2019
Peer-Review-StatusJa
Extern publiziertJa

Externe IDs

Scopus 85055657990

Schlagworte

Schlagwörter

  • 4H-SiC pin-diode, Ion implantation, Photodiode, UV sensor, Wavelength-selective