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Void Shape Evolution of Silicon Simulation in COMSOL Multiphysics

Research output: Contribution to conferences › Poster › Contributed

Contributors

Constantino Grau Turuelo - , Chair of Thermodynamics (Author)
Björn Bergmann - , Chair of Thermodynamics (Author)
Cornelia Breitkopf - , Chair of Thermodynamics (Author)

Details

Original language	English
Publication status	Published - 23 Oct 2013
Peer-reviewed	No

Conference

Title	COMSOL Conference Europe 2013
Conference number
Duration	23 - 25 October 2013
Location
City	Rotterdam
Country	Netherlands