Visual Analytics for Data-Driven Analysis in Semiconductor Manufacturing

Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review

Contributors

Details

Original languageEnglish
Title of host publicationProceedings ASIM SST 2020, 25. Symposium Simulationstechnik, 14.-15.10.2020, Online-Tagung
Place of PublicationVienna
PublisherARGESIM Publisher Vienna
Pages137-139
ISBN (electronic)978-3-901608-93-3
Publication statusPublished - 2020
Peer-reviewedYes

Publication series

SeriesARGESIM Report
Volume59

External IDs

ORCID /0000-0002-1012-8337/work/153653888
ORCID /0000-0002-1484-7187/work/153654448