Vibration analysis of micro mirrors for LIDAR using on-chip piezo-resistive sensor

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Jan Grahmann - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Richard Schroedter - , Vienna University of Technology (Author)
  • Oliver Kiethe - , FDTech GmbH (Author)
  • Ulrich Todt - , Fraunhofer Institute for Electronic Nano Systems (Author)

Details

Original languageEnglish
JournalProceedings of SPIE
Volume11293
Publication statusPublished - 2020
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 85084182147
ORCID /0000-0003-3259-4571/work/142249654

Keywords

Keywords

  • MEMS-Scanner, LIDAR, vibration, electrostatic, reliability, trajectory precision, quasi-static