Ultra-dense co-integration of FeFETs and CMOS logic enabling very-fine grained Logic-in-Memory
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Ferroelectric field-effect transistors (FeFET) based on hafnium oxide offer great opportunities for Logic-in-Memory applications, due to their natural ability to combine logic (transistor) and memory (ferroelectric material), their low-power operation, and CMOS compatible integration. Besides aggressive scaling, dense integration of FeFETs is necessary to make electronic circuits more area-efficient. This paper investigates the impact of ultra-dense co-integration of a FeFET and an n-Type selector FET, sharing the same active area, arranged in a 2TNOR memory array. The examined FeFETs exhibit a very similar switching behavior as FeFETs arranged in a standard AND-Type array, indicating that the ultra-dense co-integration does not degrade the FeFET performance, and thus, paves the path to a very fine-grained, ultra-dense Logic-in-Memory implementation. Based on this densely integrated 2TNOR array we propose a very compact design of a 4-To-1 multiplexer with a build-in look-up table, thus directly merging logic and memory.
Details
| Original language | English |
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| Title of host publication | 49th European Solid-State Device Research Conference, ESSDERC 2019 |
| Publisher | Editions Frontieres |
| Pages | 118-121 |
| Number of pages | 4 |
| ISBN (electronic) | 9781728115399 |
| Publication status | Published - Sept 2019 |
| Peer-reviewed | Yes |
Publication series
| Series | European Conference on Solid-State Device Research (ESSDERC) |
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| ISSN | 1930-8876 |
Conference
| Title | 49th European Solid-State Device Research Conference |
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| Abbreviated title | ESSDERC 2019 |
| Conference number | 49 |
| Duration | 23 - 26 September 2019 |
| Degree of recognition | International event |
| Location | University in Kraków |
| City | Cracow |
| Country | Poland |
External IDs
| ORCID | /0000-0003-3814-0378/work/142256230 |
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Keywords
ASJC Scopus subject areas
Keywords
- active area sharing, ferroelectric FET (FeFET), hafnium oxide, Logic-in-Memory (LiM), look-up table (LUT), multiplexer (MUX), ultra-dense integration