Ultra-dense co-integration of FeFETs and CMOS logic enabling very-fine grained Logic-in-Memory

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Evelyn T. Breyer - , TUD Dresden University of Technology (Author)
  • Halid Mulaosmanovic - , TUD Dresden University of Technology (Author)
  • Jens Trommer - , TUD Dresden University of Technology (Author)
  • Thomas Melde - , Global Foundries, Inc. (Author)
  • Stefan Dunkel - , Global Foundries, Inc. (Author)
  • Martin Trentzsch - , Global Foundries, Inc. (Author)
  • Sven Beyer - , Global Foundries, Inc. (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • Stefan Slesazeck - , TUD Dresden University of Technology (Author)

Abstract

Ferroelectric field-effect transistors (FeFET) based on hafnium oxide offer great opportunities for Logic-in-Memory applications, due to their natural ability to combine logic (transistor) and memory (ferroelectric material), their low-power operation, and CMOS compatible integration. Besides aggressive scaling, dense integration of FeFETs is necessary to make electronic circuits more area-efficient. This paper investigates the impact of ultra-dense co-integration of a FeFET and an n-Type selector FET, sharing the same active area, arranged in a 2TNOR memory array. The examined FeFETs exhibit a very similar switching behavior as FeFETs arranged in a standard AND-Type array, indicating that the ultra-dense co-integration does not degrade the FeFET performance, and thus, paves the path to a very fine-grained, ultra-dense Logic-in-Memory implementation. Based on this densely integrated 2TNOR array we propose a very compact design of a 4-To-1 multiplexer with a build-in look-up table, thus directly merging logic and memory.

Details

Original languageEnglish
Title of host publication49th European Solid-State Device Research Conference, ESSDERC 2019
PublisherEditions Frontieres
Pages118-121
Number of pages4
ISBN (electronic)9781728115399
Publication statusPublished - Sept 2019
Peer-reviewedYes

Publication series

SeriesEuropean Conference on Solid-State Device Research (ESSDERC)
ISSN1930-8876

Conference

Title49th European Solid-State Device Research Conference
Abbreviated titleESSDERC 2019
Conference number49
Duration23 - 26 September 2019
Degree of recognitionInternational event
LocationUniversity in Kraków
CityCracow
CountryPoland

External IDs

ORCID /0000-0003-3814-0378/work/142256230

Keywords

Keywords

  • active area sharing, ferroelectric FET (FeFET), hafnium oxide, Logic-in-Memory (LiM), look-up table (LUT), multiplexer (MUX), ultra-dense integration