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Two-dimensional low-coherence interferometry for the characterization of nanometer wafer topographies.

Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review

Contributors

C. Taudt - (Author)
T. Baselt - (Author)
B. Nelsen - (Author)
H. Aßmann - (Author)
A. Greiner - (Author)
E. Koch - , Department of Anesthesiology and Intensive Care Medicine (Author)
P. Hartmann - , University of Applied Sciences Zwickau (Author)

Details

Original language	English
Title of host publication	Proceedings of SPIE
Volume	9890
Publication status	Published - 2016
Peer-reviewed	Yes

External IDs

ORCID	/0000-0003-0554-2178/work/148606935

Keywords