Towards Reconfigurable Electronics: Silicidation of Top-Down Fabricated Silicon Nanowires

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Muhammad Bilal Khan - , Chair of Nanoelectronics (Author)
  • Dipjyoti Deb - , Helmholtz-Zentrum Dresden-Rossendorf (HZDR), TUD Dresden University of Technology (Author)
  • Jochen Kerbusch - , Helmholtz-Zentrum Dresden-Rossendorf (HZDR) (Author)
  • Florian Fuchs - , Helmholtz-Zentrum Dresden-Rossendorf (HZDR), TUD Dresden University of Technology, Chemnitz University of Technology, Fraunhofer Institute for Electronic Nano Systems (Author)
  • Markus Löffler - , Dresden Center for Nanoanalysis (DCN) (Author)
  • Sayanti Banerjee - , TUD Dresden University of Technology (Author)
  • Uwe Mühle - , Fraunhofer Institute for Ceramic Technologies and Systems (Author)
  • Walter M Weber - , TUD Dresden University of Technology (Author)
  • Sibylle Gemming - , Helmholtz-Zentrum Dresden-Rossendorf (HZDR), TUD Dresden University of Technology (Author)
  • Jörg Schuster - , Chemnitz University of Technology, TUD Dresden University of Technology (Author)
  • Artur Erbe - , Center for Advancing Electronics Dresden (cfaed), Helmholtz-Zentrum Dresden-Rossendorf (HZDR) (Author)
  • Yordan M, Georgiev - , Helmholtz-Zentrum Dresden-Rossendorf (HZDR), TUD Dresden University of Technology (Author)

Details

Original languageEnglish
Pages (from-to)3462
Number of pages1
JournalApplied sciences
Volume9
Issue number17
Publication statusPublished - 2019
Peer-reviewedYes

External IDs

Scopus 85072286808

Keywords

Research priority areas of TU Dresden