Tolerances Effect on Laser Structured Silicon-Based Multi Fourier-Horn Ultrasonic Nebulizer

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Wail Al-Mogahed - , Chemnitz University of Technology (Author)
  • Sebastian Voigt - , Chemnitz University of Technology (Author)
  • Philipp J. Mehner - , Chemnitz University of Technology (Author)
  • Georgi Paschew - , Chair of Microsystems (Author)
  • Andreas Richter - , Chair of Microsystems (Author)
  • Jan Mehner - , Chemnitz University of Technology (Author)

Abstract

Ultrasonic nebulizers have the ability to break liquid medicine into aerosols by generating standing waves at the surface of the liquid. Multi Fourier-horn ultrasonic nebulizer (MFHUN) was employed to atomize liquid by ultrasonic oscillation. UV femtosecond laser was used to structure the resonator layout on silicon wafer in order to fabricate MFHUN with reduced fabrication time and complexity. Piezoelectric transducer was manually placed on the resonator to excite longitudinal oscillation. The samples were characterized to investigate the effect of the fabrication process and the piezoelectric transducer placement tolerances on the ability of MFHUN to atomize liquid. The results showed that placing the piezoelectric transducer closer to the center of the drive section is required to increase the amplitude of the oscillation. The thickness of the adhesive layer beneath the piezoelectric transducer should not exceed 30 μm. Structures which showed amplitudes higher than the instability threshold atomized deionized water successfully.

Details

Original languageEnglish
Title of host publicationIEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
ISBN (electronic)979-8-3503-7190-1
Publication statusPublished - 2024
Peer-reviewedYes

Publication series

SeriesIEEE International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
ISSN1099-4734

Conference

Title2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium
Abbreviated titleUFFC-JS 2024
Duration22 - 26 September 2024
Website
LocationTaipei Nangang Exhibition Center & Online
CityTaipei
CountryTaiwan, Province of China

External IDs

ORCID /0000-0002-8588-9755/work/178384058
ORCID /0000-0002-8001-2356/work/178384325
ORCID /0009-0007-5260-2889/work/190133888

Keywords

Keywords

  • Adhesive layer, Multi Fourier-horn ultrasonic nebulizer, Piezoelectric transducer, silicon laser structuring, UV femtosecond laser