Tolerances Effect on Laser Structured Silicon-Based Multi Fourier-Horn Ultrasonic Nebulizer
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Ultrasonic nebulizers have the ability to break liquid medicine into aerosols by generating standing waves at the surface of the liquid. Multi Fourier-horn ultrasonic nebulizer (MFHUN) was employed to atomize liquid by ultrasonic oscillation. UV femtosecond laser was used to structure the resonator layout on silicon wafer in order to fabricate MFHUN with reduced fabrication time and complexity. Piezoelectric transducer was manually placed on the resonator to excite longitudinal oscillation. The samples were characterized to investigate the effect of the fabrication process and the piezoelectric transducer placement tolerances on the ability of MFHUN to atomize liquid. The results showed that placing the piezoelectric transducer closer to the center of the drive section is required to increase the amplitude of the oscillation. The thickness of the adhesive layer beneath the piezoelectric transducer should not exceed 30 μm. Structures which showed amplitudes higher than the instability threshold atomized deionized water successfully.
Details
| Original language | English |
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| Title of host publication | IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| ISBN (electronic) | 979-8-3503-7190-1 |
| Publication status | Published - 2024 |
| Peer-reviewed | Yes |
Publication series
| Series | IEEE International Symposium on Applications of Ferroelectrics (IFCS-ISAF) |
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| ISSN | 1099-4734 |
Conference
| Title | 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium |
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| Abbreviated title | UFFC-JS 2024 |
| Duration | 22 - 26 September 2024 |
| Website | |
| Location | Taipei Nangang Exhibition Center & Online |
| City | Taipei |
| Country | Taiwan, Province of China |
External IDs
| ORCID | /0000-0002-8588-9755/work/178384058 |
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| ORCID | /0000-0002-8001-2356/work/178384325 |
| ORCID | /0009-0007-5260-2889/work/190133888 |
Keywords
ASJC Scopus subject areas
Keywords
- Adhesive layer, Multi Fourier-horn ultrasonic nebulizer, Piezoelectric transducer, silicon laser structuring, UV femtosecond laser