Tolerances Effect on Laser Structured Silicon-Based Multi Fourier-Horn Ultrasonic Nebulizer

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Wail Al-Mogahed - , Technische Universität Chemnitz (Autor:in)
  • Sebastian Voigt - , Technische Universität Chemnitz (Autor:in)
  • Philipp J. Mehner - , Technische Universität Chemnitz (Autor:in)
  • Georgi Paschew - , Professur für Mikrosystemtechnik (Autor:in)
  • Andreas Richter - , Professur für Mikrosystemtechnik (Autor:in)
  • Jan Mehner - , Technische Universität Chemnitz (Autor:in)

Abstract

Ultrasonic nebulizers have the ability to break liquid medicine into aerosols by generating standing waves at the surface of the liquid. Multi Fourier-horn ultrasonic nebulizer (MFHUN) was employed to atomize liquid by ultrasonic oscillation. UV femtosecond laser was used to structure the resonator layout on silicon wafer in order to fabricate MFHUN with reduced fabrication time and complexity. Piezoelectric transducer was manually placed on the resonator to excite longitudinal oscillation. The samples were characterized to investigate the effect of the fabrication process and the piezoelectric transducer placement tolerances on the ability of MFHUN to atomize liquid. The results showed that placing the piezoelectric transducer closer to the center of the drive section is required to increase the amplitude of the oscillation. The thickness of the adhesive layer beneath the piezoelectric transducer should not exceed 30 μm. Structures which showed amplitudes higher than the instability threshold atomized deionized water successfully.

Details

OriginalspracheEnglisch
TitelIEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
ISBN (elektronisch)979-8-3503-7190-1
PublikationsstatusVeröffentlicht - 2024
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
ISSN1099-4734

Konferenz

Titel2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium
KurztitelUFFC-JS 2024
Dauer22 - 26 September 2024
Webseite
OrtTaipei Nangang Exhibition Center & Online
StadtTaipei
LandTaiwan

Externe IDs

ORCID /0000-0002-8588-9755/work/178384058
ORCID /0000-0002-8001-2356/work/178384325
ORCID /0009-0007-5260-2889/work/190133888

Schlagworte

Schlagwörter

  • Adhesive layer, Multi Fourier-horn ultrasonic nebulizer, Piezoelectric transducer, silicon laser structuring, UV femtosecond laser