TITANIUM GETTERING IN SILICON - INVESTIGATION BY DEEP LEVEL TRANSIENT SPECTROSCOPY AND SECONDARY ION MASS-SPECTROSCOPY

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

Details

Original languageEnglish
Pages (from-to)3472-3474
Number of pages3
JournalJournal of Applied Physics
Issue number8
Publication statusPublished - 1987
Peer-reviewedYes

External IDs

Scopus 0008495167

Keywords