Per- and polyfluoroalkyl substances (PFAS) are used in food contact materials (FCMs), e.g. as production aids in the fabrication of PTFE based coatings for kitchenware or as additives in paper and board. Growing concerns about the environment and health related to PFAS have led to an increasing interest in monitoring PFAS levels in FCMs as well as their migration into food. In this study, method development for the analysis of PFAS by thermal desorption–gas chromatography–mass spectrometry (TD-GC-MS) was done. In addition to fluorotelomer alcohols (FTOHs), which are the only PFAS commonly analysed by GC-MS, it was proven that perfluorocarboxylic acids (PFCAs) and per- and polyfluoroether carboxylic acids (PFECAs) as well as their thermolysis products, perfluoroethers (PFEs) and perfluoroalkenes, can be analysed by GC-MS without prior derivatization. Screening for PFCAs and FTOHs was possible by electron impact ionization (EI) using group specific SIM fragments. Confirmation of identity has been done by EI scans as well as chemical ionization (CI) SIM measurements. LODs (limits of detection) of PFCAs, FTOHs and PFECAs in the TD-GC-MS instrument were in the low pg range. Thermal degradation of PFCAs and PFECAs during TD-GC-MS measurement was investigated.