The Correct Level of Model Complexity in Semiconductor Fab Simulation—Lessons Learned from Practice

Research output: Contribution to conferences › Paper › Contributed › peer-review

Contributors

Details

Original languageEnglish
Pages133-139
Number of pages7
Publication statusPublished - 2016
Peer-reviewedYes

External IDs

Scopus 84979645596
ORCID /0000-0002-1484-7187/work/142243066

Keywords

Keywords

  • Automated Material Handling System, Level of Detail, Discrete Event Simulation, Accuracy