The atomic and electronic structure of Hf0.5Zr0.5O2 and Hf0.5Zr0.5O2:La films
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
HfxZr1-xO2 and lanthanum-doped HfxZr1-xO2:La thin films are candidates for applications in ferroelectric random-access memory. Here, we explore the atomic and electronic structure of Hf0.5Zr0.5O2 and Hf0.5Zr0.5O2:La thin films grown by atomic layer deposition. Using X-ray photoelectron spectroscopy, it was found that the oxides under study have an almost identical electronic structure and a bandgap of about 5.4 eV. The Hf0.5Zr0.5O2:La film was shown to consist of the mixture of Hf0.5Zr0.5O2 and La2O3 phases. The bombardment with argon ions of the studied films leads to oxygen vacancy generation in the near-surface layer. The oxygen vacancy concentrations in the bombarded films were evaluated from the comparison of experimental valence band photoelectron spectra with the theoretical ones calculated using the density functional theory.
Details
Original language | English |
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Pages (from-to) | 595-600 |
Number of pages | 6 |
Journal | Journal of Science: Advanced Materials and Devices |
Volume | 6 |
Issue number | 4 |
Publication status | Published - Dec 2021 |
Peer-reviewed | Yes |
External IDs
ORCID | /0000-0003-3814-0378/work/142256171 |
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Keywords
ASJC Scopus subject areas
Keywords
- Electronic structure, FeRAM, HfZrO, Oxygen vacancy, XPS