Temperature-Dependent Subcycling Behavior of Si-Doped HfO2Ferroelectric Thin Films

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Shuaidong Li - , Dalian University of Technology (Author)
  • Dayu Zhou - , Dalian University of Technology (Author)
  • Zhixin Shi - , Dalian University of Technology (Author)
  • Michael Hoffmann - , TUD Dresden University of Technology (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, Technische Universität Dresden (Author)
  • Uwe Schroeder - , TUD Dresden University of Technology (Author)

Abstract

The involvement of unwanted subcycling behavior in endurance cycling of HfO2-based ferroelectric thin films is detrimental to the reliability performance of nonvolatile memory devices. Subcycling is also critical for emerging neuromorphic applications as well as multilevel memory cells, which are deliberately operated in subloops of the polarization hysteresis. There is a substantial mismatch between the proven application potential and the lack of basic studies on subcycling behavior. In this work, the temperature-dependent subcycling behavior of a 5 mol % Si-doped HfO2 ferroelectric thin film is investigated by carefully comparing the evolution of P-E and I-E hysteresis loops during subcycling at 80-350 K. The switching density distributions before and after 108 subcycles at various temperatures are characterized using first-order reversal curve measurements to reveal the changes in the coercive field and internal bias fields. Based on a defect segregation-induced local bias field model, the establishment of different local bias fields during subcycling and its temperature dependence are thoroughly discussed.

Details

Original languageEnglish
Pages (from-to)2415-2422
Number of pages8
JournalACS applied electronic materials
Volume3
Issue number5
Publication statusPublished - 25 May 2021
Peer-reviewedYes

External IDs

ORCID /0000-0003-3814-0378/work/142256176

Keywords

Keywords

  • bias fields, hafnium oxide, oxygen vacancies, subcycling, temperature dependence