Temperature dependence of strain-phonon coefficient in epitaxial Ge/Si(001): A comprehensive analysis

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • C. L. Manganelli - , Innovations for High Performance Microelectronics (Author)
  • M. Virgilio - , University of Pisa (Author)
  • O. Skibitzki - , Innovations for High Performance Microelectronics (Author)
  • M. Salvalaglio - , Innovations for High Performance Microelectronics, TUD Dresden University of Technology (Author)
  • D. Spirito - , Innovations for High Performance Microelectronics (Author)
  • P. Zaumseil - , Innovations for High Performance Microelectronics (Author)
  • Y. Yamamoto - , Innovations for High Performance Microelectronics (Author)
  • M. Montanari - , Roma Tre University (Author)
  • W. M. Klesse - , Innovations for High Performance Microelectronics (Author)
  • G. Capellini - , Roma Tre University (Author)

Abstract

We investigate the temperature dependence of the Ge Raman mode strain-phonon coefficient in Ge/Si heteroepitaxial layers. By analyzing the temperature-dependent evolution of both the Raman Ge& x2500;Ge line and of the Ge lattice strain, we obtain a linear dependence of the strain-phonon coefficient as a function of temperature. Our findings provide an efficient method for capturing the temperature-dependent strain relaxation mechanism in heteroepitaxial systems. Furthermore, we show that the rather large variability reported in the literature for the strain-phonon coefficient values might be due to the local heating of the sample due to the excitation laser used in mu-Raman experiments.

Details

Original languageEnglish
Pages (from-to)989-996
Number of pages8
JournalJournal of Raman spectroscopy
Volume51
Issue number6
Publication statusPublished - Jun 2020
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 85080031546
ORCID /0000-0002-4217-0951/work/142237403

Keywords

Keywords

  • Germanium, temperature-dependent, strain, phonon coefficient, epitaxial layers, HR-XRD, RAMAN FREQUENCIES, GE, SI, CRYSTALS, DIAMOND, SILICON, SCATTERING, MOBILITY, SHIFT