Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • R. Huber - , Leibniz Institute for Solid State and Materials Research Dresden, Chemnitz University of Technology (Author)
  • F. Kern - , Chair of Experimental Solid State Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • D. D. Karnaushenko - , Leibniz Institute for Solid State and Materials Research Dresden, Chemnitz University of Technology (Author)
  • E. Eisner - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • P. Lepucki - , Chair of Experimental Solid State Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • A. Thampi - , Chair of Experimental Solid State Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • A. Mirhajivarzaneh - , Chair of Experimental Solid State Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • C. Becker - , Leibniz Institute for Solid State and Materials Research Dresden, Chemnitz University of Technology (Author)
  • T. Kang - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • S. Baunack - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • B. Büchner - , Chair of Experimental Solid State Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • D. Karnaushenko - , Leibniz Institute for Solid State and Materials Research Dresden, Chemnitz University of Technology (Author)
  • O. G. Schmidt - , Leibniz Institute for Solid State and Materials Research Dresden, Chemnitz University of Technology, TUD Dresden University of Technology (Author)
  • A. Lubk - , CEOS- Endowed Chair of Electron Optics (with IFW), Leibniz Institute for Solid State and Materials Research Dresden (Author)

Abstract

Tunable electromagnets and corresponding devices, such as magnetic lenses or stigmators, are the backbone of high-energy charged particle optical instruments, such as electron microscopes, because they provide higher optical power, stability, and lower aberrations compared to their electric counterparts. However, electromagnets are typically macroscopic (super-)conducting coils, which cannot generate swiftly changing magnetic fields, require active cooling, and are structurally bulky, making them unsuitable for fast beam manipulation, multibeam instruments, and miniaturized applications. Here, we present an on-chip microsized magnetic charged particle optics realized via a self-assembling micro-origami process. These micro-electromagnets can generate alternating magnetic fields of about ±100 mT up to a hundred MHz, supplying sufficiently large optical power for a large number of charged particle optics applications. That particular includes fast spatiotemporal electron beam modulation such as electron beam deflection, focusing, and wave front shaping as required for stroboscopic imaging.

Details

Original languageEnglish
Article number3220
Number of pages9
JournalNature communications
Volume13
Issue number1
Publication statusPublished - 9 Jun 2022
Peer-reviewedYes

External IDs

PubMed 35680873