Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • R. Huber - , Leibniz Institute for Solid State and Materials Research Dresden, Technische Universität Chemnitz (Autor:in)
  • F. Kern - , Professur für Experimentelle Festkörperphysik (gB/IFW), Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • D. D. Karnaushenko - , Leibniz Institute for Solid State and Materials Research Dresden, Technische Universität Chemnitz (Autor:in)
  • E. Eisner - , Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • P. Lepucki - , Professur für Experimentelle Festkörperphysik (gB/IFW), Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • A. Thampi - , Professur für Experimentelle Festkörperphysik (gB/IFW), Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • A. Mirhajivarzaneh - , Professur für Experimentelle Festkörperphysik (gB/IFW), Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • C. Becker - , Leibniz Institute for Solid State and Materials Research Dresden, Technische Universität Chemnitz (Autor:in)
  • T. Kang - , Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • S. Baunack - , Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • B. Büchner - , Professur für Experimentelle Festkörperphysik (gB/IFW), Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)
  • D. Karnaushenko - , Leibniz Institute for Solid State and Materials Research Dresden, Technische Universität Chemnitz (Autor:in)
  • O. G. Schmidt - , Leibniz Institute for Solid State and Materials Research Dresden, Technische Universität Chemnitz, Technische Universität Dresden (Autor:in)
  • A. Lubk - , CEOS-Stiftungsprofessur für Elektronenoptik (gB/IFW), Leibniz Institute for Solid State and Materials Research Dresden (Autor:in)

Abstract

Tunable electromagnets and corresponding devices, such as magnetic lenses or stigmators, are the backbone of high-energy charged particle optical instruments, such as electron microscopes, because they provide higher optical power, stability, and lower aberrations compared to their electric counterparts. However, electromagnets are typically macroscopic (super-)conducting coils, which cannot generate swiftly changing magnetic fields, require active cooling, and are structurally bulky, making them unsuitable for fast beam manipulation, multibeam instruments, and miniaturized applications. Here, we present an on-chip microsized magnetic charged particle optics realized via a self-assembling micro-origami process. These micro-electromagnets can generate alternating magnetic fields of about ±100 mT up to a hundred MHz, supplying sufficiently large optical power for a large number of charged particle optics applications. That particular includes fast spatiotemporal electron beam modulation such as electron beam deflection, focusing, and wave front shaping as required for stroboscopic imaging.

Details

OriginalspracheEnglisch
Aufsatznummer3220
Seitenumfang9
FachzeitschriftNature communications
Jahrgang13 (2022)
Ausgabenummer1
PublikationsstatusVeröffentlicht - 9 Juni 2022
Peer-Review-StatusJa

Externe IDs

PubMed 35680873