SYSTEM FOR THE PRODUCTION OF ELECTRIC AND INTEGRATED CIRCUITS

Research output: Intellectual Property › Patent application/Patent

Contributors

  • Fraunhofer-Gesellschaft

Details

Original languageEnglish
IPC (International Patent Classification)H05K 1/ 00 A N
Patent numberAU2002352260
Country/TerritoryGermany
Priority date23 Dec 2002
Priority numberWO2002EP14741
Publication statusPublished - 24 Jul 2003
No renderer: customAssociatesEventsRenderPortal,dk.atira.pure.api.shared.model.researchoutput.Patent

External IDs

ORCID /0000-0002-0757-3325/work/142660448

Keywords