Surface acoustic wave spectroscopy for non-destructive coating and bulk characterization at temperatures up to 600°C enabled by piezoelectric aluminum nitride coated sensor

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Stefan Makowski - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Martin Zawischa - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Dieter Schneider - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Stephan Barth - , Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology (Author)
  • Sebastian Schettler - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Thanh Tung Hoang - , Fraunhofer Institute for Material and Beam Technology (Author)
  • Hagen Bartzsch - , Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology (Author)
  • Martina Zimmermann - , Chair of Mechanics of Materials and Failure Analysis, Fraunhofer Institute for Material and Beam Technology (Author)

Abstract

Surface acoustic wave spectroscopy has been established as non-destructive and fast method for characterization of mechanical properties of surfaces and bulk materials in both research and industry. The present work shows that by application of a novel and robust aluminum nitride (AlN) coated piezoelectric contact sensor the advantages of the method can be extended from room temperature to at least 600°C. An overview of sensor concepts and applications of the method is discussed first, followed by theoretical and practical considerations for design and coating of a novel temperature stable contact sensor. After fabrication of such a sensor using magnetron sputtering, it was tested in a modified surface acoustic wave spectroscopy setup with an incorporated heating table concerning signal amplitude and frequency range. The AlN coated sensor was found to perform well up to 600°C, with temperature limited by the specification of the heating table. At room temperature, performance was acceptable when compared with a conventional contact sensor using a PVDF piezoelectric foil. Application of the high temperature capabilities of the setup was demonstrated by measuring temperature stability of hydrogen-free amorphous carbon coatings (a-C and ta-C) depending on their sp3 carbon ratio. In another example, high precision temperature dependent measurement of Young's modulus for ultrasonic fatigue test specimen was taken, achieving an accuracy better than 1%. Use of the developed sensor opens up new possibilities in material science for in situ study of temperature depending mechanical properties for coatings and surfaces.

Details

Original languageEnglish
Pages (from-to)319-332
Number of pages14
JournalSurface and interface analysis
Volume56
Issue number5
Publication statusPublished - May 2024
Peer-reviewedYes

Keywords

Keywords

  • AlN, coating characterization, high temperature, surface acoustic wave spectroscopy, ta-C, ultrasonic fatique