Strontium doped hafnium oxide thin films: Wide process window for ferroelectric memories

Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review

Contributors

Details

Original languageEnglish
Title of host publicationEuropean Solid-State Device Research Conference
Publication statusPublished - 2013
Peer-reviewedYes

External IDs

Scopus 84902214155

Keywords