Solid Body and Multi-Component Arrangement
Research output: Intellectual property › Patent application/Patent
Contributors
- Siltectra GmbH
Abstract
A solid body is disclosed. The solid body includes: a detachment plane in an interior space of the solid body, the detachment plane including laser radiation-induced modifications; and a region including layers and/or components. A multi-component arrangement is also disclosed. The multi-component arrangement includes: a solid-body layer including more than 50% SiC and modifications or modification components generating pressure tensions in a region of a first surface, the modifications being amorphized components of the solid-body layer, the modifications being spaced closer to the first surface than to a second surface opposite the first surface, the first surface being essentially level; and a metal layer on the first surface of the solid-body layer.
Details
A solid body is disclosed. The solid body includes: a detachment plane in an interior space of the solid body, the detachment plane including laser radiation-induced modifications; and a region including layers and/or components. A multi-component arrangement is also disclosed. The multi-component arrangement includes: a solid-body layer including more than 50% SiC and modifications or modification components generating pressure tensions in a region of a first surface, the modifications being amorphized components of the solid-body layer, the modifications being spaced closer to the first surface than to a second surface opposite the first surface, the first surface being essentially level; and a metal layer on the first surface of the solid-body layer.
| Original language | English |
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| IPC (International Patent Classification) | H01L 21/ 324 A I |
| Patent number | US2021225659 |
| Filing date | 22 Mar 2021 |
| Country/Territory | United States of America |
| Priority date | 22 Mar 2021 |
| Priority number | US202117207894 |
| Publication status | Published - 22 Jul 2021 |
| Externally published | Yes |
External IDs
| ORCID | /0000-0003-2572-1149/work/208796501 |
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