Solid Body and Multi-Component Arrangement
Publikation: Geistiges Eigentum › Patentanmeldung/Patent
Beitragende
- Siltectra GmbH
Abstract
A solid body is disclosed. The solid body includes: a detachment plane in an interior space of the solid body, the detachment plane including laser radiation-induced modifications; and a region including layers and/or components. A multi-component arrangement is also disclosed. The multi-component arrangement includes: a solid-body layer including more than 50% SiC and modifications or modification components generating pressure tensions in a region of a first surface, the modifications being amorphized components of the solid-body layer, the modifications being spaced closer to the first surface than to a second surface opposite the first surface, the first surface being essentially level; and a metal layer on the first surface of the solid-body layer.
Details
A solid body is disclosed. The solid body includes: a detachment plane in an interior space of the solid body, the detachment plane including laser radiation-induced modifications; and a region including layers and/or components. A multi-component arrangement is also disclosed. The multi-component arrangement includes: a solid-body layer including more than 50% SiC and modifications or modification components generating pressure tensions in a region of a first surface, the modifications being amorphized components of the solid-body layer, the modifications being spaced closer to the first surface than to a second surface opposite the first surface, the first surface being essentially level; and a metal layer on the first surface of the solid-body layer.
| Originalsprache | Englisch |
|---|---|
| IPC (Internationale Patentklassifikation) | H01L 21/ 324 A I |
| Veröffentlichungsnummer | US2021225659 |
| Anmeldedatum | 22 März 2021 |
| Land/Gebiet | USA/Vereinigte Staaten |
| Prioritätsdatum | 22 März 2021 |
| Prioritätsnummer | US202117207894 |
| Publikationsstatus | Veröffentlicht - 22 Juli 2021 |
| Extern publiziert | Ja |
Externe IDs
| ORCID | /0000-0003-2572-1149/work/208796501 |
|---|