Silver Thin-Film Electrodes Grown by Low-Temperature Plasma-Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Tim Hasselmann - , University of Wuppertal (Author)
  • Bujamin Misimi - , University of Wuppertal (Author)
  • Nils Boysen - , Ruhr University Bochum (Author)
  • David Zanders - , Ruhr University Bochum (Author)
  • Jan Lucas Wree - , Ruhr University Bochum (Author)
  • Detlef Rogalla - , Ruhr University Bochum (Author)
  • Tobias Haeger - , University of Wuppertal (Author)
  • Florian Zimmermann - , University of Wuppertal (Author)
  • Kai Oliver Brinkmann - , University of Wuppertal (Author)
  • Sebastian Schädler - , Carl Zeiss AG (Author)
  • Detlef Theirich - , University of Wuppertal (Author)
  • Ralf Heiderhoff - , University of Wuppertal (Author)
  • Anjana Devi - , Ruhr University Bochum (Author)
  • Thomas Riedl - , University of Wuppertal (Author)

Abstract

The unique properties of atomic layer deposition (ALD) are mainly exploited for metal oxides, while the growth of metals, such as silver, is still in its infancy. Low growth temperatures and high growth rates are essential to achieve conductive (i.e. percolated) films. Here, a study based on the authors’ recently introduced N-heterocyclic carbene-based Ag amide precursor [(NHC)Ag(hmds)] (1,3-di-tert-butyl-imidazolin-2-ylidene silver(I) 1,1,1-trimethyl-N-(trimethylsilyl) silanaminide) using plasma-enhanced spatial ALD at atmospheric pressure and at deposition temperatures as low as 60 °C, is provided. The favorable reactivity and high volatility of the [(NHC)Ag(hmds)] precursor affords high growth rates up to 3.4 × 1014 Ag atoms cm–2 per cycle, which are ≈2.5 times higher than that found with the established triethylphosphine(6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionate) silver(I) [Ag(fod)(PEt3)] precursor. Consequently, highly conductive Ag films with resistivities as low as 2.7 µΩ cm are achieved at a deposition temperature of 100 °C with a percolation threshold of ≈2.6 × 1017 Ag atoms cm–2, which is more than 1.6 times lower compared to [Ag(fod)(PEt3)]. As a concept study, conductive Ag layers are used as bottom electrodes in organic solar cells, that achieve the same performance as those based on Ag electrodes resulting from a high vacuum process.

Details

Original languageEnglish
Article number2200796
JournalAdvanced materials technologies
Volume8
Issue number1
Publication statusPublished - 10 Jan 2023
Peer-reviewedYes
Externally publishedYes

Keywords

Keywords

  • atmospheric pressure, atomic layer deposition, electrodes, organic solar cells, plasma enhanced ALD, silver, spatial ALD