Silver Thin-Film Electrodes Grown by Low-Temperature Plasma-Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Tim Hasselmann - , Bergische Univertsität Wuppertal (Autor:in)
  • Bujamin Misimi - , Bergische Univertsität Wuppertal (Autor:in)
  • Nils Boysen - , Ruhr-Universität Bochum (Autor:in)
  • David Zanders - , Ruhr-Universität Bochum (Autor:in)
  • Jan Lucas Wree - , Ruhr-Universität Bochum (Autor:in)
  • Detlef Rogalla - , Ruhr-Universität Bochum (Autor:in)
  • Tobias Haeger - , Bergische Univertsität Wuppertal (Autor:in)
  • Florian Zimmermann - , Bergische Univertsität Wuppertal (Autor:in)
  • Kai Oliver Brinkmann - , Bergische Univertsität Wuppertal (Autor:in)
  • Sebastian Schädler - , Carl Zeiss AG (Autor:in)
  • Detlef Theirich - , Bergische Univertsität Wuppertal (Autor:in)
  • Ralf Heiderhoff - , Bergische Univertsität Wuppertal (Autor:in)
  • Anjana Devi - , Ruhr-Universität Bochum (Autor:in)
  • Thomas Riedl - , Bergische Univertsität Wuppertal (Autor:in)

Abstract

The unique properties of atomic layer deposition (ALD) are mainly exploited for metal oxides, while the growth of metals, such as silver, is still in its infancy. Low growth temperatures and high growth rates are essential to achieve conductive (i.e. percolated) films. Here, a study based on the authors’ recently introduced N-heterocyclic carbene-based Ag amide precursor [(NHC)Ag(hmds)] (1,3-di-tert-butyl-imidazolin-2-ylidene silver(I) 1,1,1-trimethyl-N-(trimethylsilyl) silanaminide) using plasma-enhanced spatial ALD at atmospheric pressure and at deposition temperatures as low as 60 °C, is provided. The favorable reactivity and high volatility of the [(NHC)Ag(hmds)] precursor affords high growth rates up to 3.4 × 1014 Ag atoms cm–2 per cycle, which are ≈2.5 times higher than that found with the established triethylphosphine(6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionate) silver(I) [Ag(fod)(PEt3)] precursor. Consequently, highly conductive Ag films with resistivities as low as 2.7 µΩ cm are achieved at a deposition temperature of 100 °C with a percolation threshold of ≈2.6 × 1017 Ag atoms cm–2, which is more than 1.6 times lower compared to [Ag(fod)(PEt3)]. As a concept study, conductive Ag layers are used as bottom electrodes in organic solar cells, that achieve the same performance as those based on Ag electrodes resulting from a high vacuum process.

Details

OriginalspracheEnglisch
Aufsatznummer2200796
FachzeitschriftAdvanced materials technologies
Jahrgang8
Ausgabenummer1
PublikationsstatusVeröffentlicht - 10 Jan. 2023
Peer-Review-StatusJa
Extern publiziertJa

Schlagworte

Schlagwörter

  • atmospheric pressure, atomic layer deposition, electrodes, organic solar cells, plasma enhanced ALD, silver, spatial ALD