Silicon doping of HVPE GaN bulk-crystals avoiding tensile strain generation

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Patrick Hofmann - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Christian Röder - , Freiberg University of Mining and Technology (Author)
  • Frank Habel - , Freiberger Compound Materials GmbH (Author)
  • Gunnar Leibiger - , Freiberger Compound Materials GmbH (Author)
  • Franziska C. Beyer - , Freiberg University of Mining and Technology (Author)
  • Günter Gärtner - , Freiberg University of Mining and Technology (Author)
  • Stefan Eichler - , Freiberger Compound Materials GmbH (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

Doped GaN:Si crystals were grown in a commercially available vertical HVPE reactor. The templates used for the HVPE heteroepitaxy were so-called FACELO seeds, with a starting GaN layer thickness of 3-4 μm. The FWHM of the 0002 and the reflection of the HVPE-grown GaN:Si crystals with a thickness of 3 mm are and , respectively, indicating excellent crystal quality. Hall measurements resulted in a charge carrier concentration of cm-3, while exhibiting a mobility of 250 cm-2V-1 s-1. These values coincide with the values extracted from FTIR measurements and the lineshape fitting of the A1(LO)/plasmon coupled phonon mode of the confocal Raman measurements. SIMS investigations yielded a silicon atom concentration of cm-3. This indicates an activation of the dopant atoms of approximately 90%. The TDD determined by CL dark spot counting was cm-2. Within the measurement accuracy, the confocal Raman measurements did not show a tensile strain generation due to the silicon doping with resulting charge carrier concentrations of cm-3.

Details

Original languageEnglish
Article number075502
JournalJournal of Physics D: Applied Physics
Volume49
Issue number7
Publication statusPublished - 28 Jan 2016
Peer-reviewedYes

External IDs

ORCID /0000-0003-3814-0378/work/142256275

Keywords

Keywords

  • confocal raman, FACELO, GaN:Si, tensile strain

Library keywords