Si CMOS compatible, compliant integration of lattice-mismatched semiconductors on Si(001): Example of fully coherent Ge/Si nanostructures

Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review

Contributors

  • F. Montalenti - , University of Milan - Bicocca (Author)
  • M. Salvalaglio - , University of Milan - Bicocca (Author)
  • A. Marzegalli - , University of Milan - Bicocca (Author)
  • P. Zaumseil - , Leibniz Institute for High Performance Microelectronics (Author)
  • G. Capellini - , Roma Tre University (Author)
  • T. U. Schuelli - , European Synchrotron Radiat Facil, European Synchrotron Radiation Facility (ESRF) (Author)
  • M. A. Schubert - , Leibniz Institute for High Performance Microelectronics (Author)
  • Y. Yamamoto - , Leibniz Institute for High Performance Microelectronics (Author)
  • B. Tillack - , Technical University of Berlin (Author)
  • T. Schroeder - , Leibniz Institute for High Performance Microelectronics, Brandenburg University of Technology (Author)

Details

Original languageEnglish
Title of host publication2014 7TH INTERNATIONAL SILICON-GERMANIUM TECHNOLOGY AND DEVICE MEETING (ISTDM)
PublisherWiley-IEEE Press
Pages149-150
Number of pages2
Publication statusPublished - 2014
Peer-reviewedYes
Externally publishedYes

Conference

Title7th International Silicon-Germanium Technology and Device Meeting (ISTDM)
Duration2 - 4 June 2014
CitySingapore
CountrySingapore

External IDs

Scopus 84906684284
ORCID /0000-0002-4217-0951/work/142237393

Keywords