Short-wavelength photoluminescence of SiO2 layers implanted with high doses of Si+, Ge+, and Ar+ ions

Research output: Contribution to journalResearch articleContributed

Contributors

  • GA Kachurin - (Author)
  • IE Tyschenko - (Author)
  • L Rebohle - (Author)
  • W Skorupa - (Author)
  • RA Yankov - (Author)
  • H Froeb - (Author)
  • T Boehme - (Author)
  • Karl Leo - , Chair of Opto-Electronics (Author)

Details

Original languageEnglish
Pages (from-to)392-396
Number of pages5
JournalSemiconductors
Issue number4
Publication statusPublished - 1998
Peer-reviewedNo

External IDs

Scopus 0041193059