Skip to content Skip to footer

Research Portal of the TU Dresden

Shock and Vibration Tests for Automatic Thin Wafer Transportation

Research output: Contribution to conferences › Paper › Contributed › peer-review

Contributors

Tobias Müller - , Chair of Material Handling (Author)
Sebastian Rank - , Chair of Material Handling (Author)
Christian Hammel - , Chair of Material Handling (Author)
Germar Schneider - (Author)

Details

Original language	English
Publication status	Published - 2015
Peer-reviewed	Yes

Keywords

Keywords

Transportsystem, Dünnwafer, Shaker, wafer transportation, vibration