Self-Aligned on-Chip Spherical Dielectric Resonators and Antennas for SiGe MMIC
Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Spherical dielectric resonators are investigated as on-chip high-efficiency antenna and as on-chip high-Q resonator. A dielectric sphere of alumina ceramic is precisely placed atop the semiconductor in a shallow crate etched into the back-end-of-line dielectric layers on the chip surface. The sphere resonates in a higher-order mode, efficiently coupled to the on-chip planar microstrip excitation structure. For sphere diameter of 1.1 mm, an antenna with gain of 5.1 dBi and efficiency of 33% is demonstrated at 100 GHz. For a sphere diameter of 1 mm, a resonator is demonstrated with measured loaded Q-factor of 143 at 103 GHz.
Details
Original language | English |
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Title of host publication | 2022 Asia-Pacific Microwave Conference (APMC) |
Publisher | IEEE |
Pages | 686-688 |
Number of pages | 3 |
ISBN (electronic) | 9784902339567 |
ISBN (print) | 978-1-6654-5108-6 |
Publication status | Published - 2 Dec 2022 |
Peer-reviewed | Yes |
Conference
Title | 2022 Asia-Pacific Microwave Conference, APMC 2022 |
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Duration | 29 November - 2 December 2022 |
Location | Yokohama, Japan |
City | Yokohama |
Country | Japan |
External IDs
Scopus | 85146662715 |
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Keywords
Keywords
- Antenna measurements, Dielectric resonator antennas, Microwave antennas, Millimeter wave measurements, Q-factor, Semiconductor device measurement, System-on-chip