Self-Aligned on-Chip Spherical Dielectric Resonators and Antennas for SiGe MMIC

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

Abstract

Spherical dielectric resonators are investigated as on-chip high-efficiency antenna and as on-chip high-Q resonator. A dielectric sphere of alumina ceramic is precisely placed atop the semiconductor in a shallow crate etched into the back-end-of-line dielectric layers on the chip surface. The sphere resonates in a higher-order mode, efficiently coupled to the on-chip planar microstrip excitation structure. For sphere diameter of 1.1 mm, an antenna with gain of 5.1 dBi and efficiency of 33% is demonstrated at 100 GHz. For a sphere diameter of 1 mm, a resonator is demonstrated with measured loaded Q-factor of 143 at 103 GHz.

Details

Original languageEnglish
Title of host publication2022 Asia-Pacific Microwave Conference, APMC 2022 - Proceedings
PublisherIEEE
Pages686-688
Number of pages3
ISBN (electronic)9784902339567
ISBN (print)978-1-6654-5108-6
Publication statusPublished - 2 Dec 2022
Peer-reviewedYes

Conference

Title2022 Asia-Pacific Microwave Conference, APMC 2022
Duration29 November - 2 December 2022
LocationYokohama, Japan
CityYokohama
CountryJapan

External IDs

Scopus 85146662715

Keywords

ASJC Scopus subject areas

Keywords

  • Antenna measurements, Dielectric resonator antennas, Microwave antennas, Millimeter wave measurements, Q-factor, Semiconductor device measurement, System-on-chip, on-chip antenna, dielectric resonator, millimeter waves, on-chip resonator