Self-Aligned on-Chip Spherical Dielectric Resonators and Antennas for SiGe MMIC
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Spherical dielectric resonators are investigated as on-chip high-efficiency antenna and as on-chip high-Q resonator. A dielectric sphere of alumina ceramic is precisely placed atop the semiconductor in a shallow crate etched into the back-end-of-line dielectric layers on the chip surface. The sphere resonates in a higher-order mode, efficiently coupled to the on-chip planar microstrip excitation structure. For sphere diameter of 1.1 mm, an antenna with gain of 5.1 dBi and efficiency of 33% is demonstrated at 100 GHz. For a sphere diameter of 1 mm, a resonator is demonstrated with measured loaded Q-factor of 143 at 103 GHz.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2022 Asia-Pacific Microwave Conference, APMC 2022 - Proceedings |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers (IEEE) |
| Seiten | 686-688 |
| Seitenumfang | 3 |
| ISBN (elektronisch) | 9784902339567 |
| ISBN (Print) | 978-1-6654-5108-6 |
| Publikationsstatus | Veröffentlicht - 2 Dez. 2022 |
| Peer-Review-Status | Ja |
Konferenz
| Titel | 30th Asia-Pacific Microwave Conference |
|---|---|
| Untertitel | Challenges of microwave engineering for the super smart society in the new normal |
| Kurztitel | APMC 2022 |
| Veranstaltungsnummer | 30 |
| Dauer | 29 November - 2 Dezember 2022 |
| Webseite | |
| Bekanntheitsgrad | Internationale Veranstaltung |
| Ort | Pacifico YOKOHAMA & Online |
| Stadt | Yokohama |
| Land | Japan |
Externe IDs
| Scopus | 85146662715 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Antenna measurements, Dielectric resonator antennas, Microwave antennas, Millimeter wave measurements, Q-factor, Semiconductor device measurement, System-on-chip, on-chip antenna, dielectric resonator, millimeter waves, on-chip resonator