Self-Aligned on-Chip Spherical Dielectric Resonators and Antennas for SiGe MMIC

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

Spherical dielectric resonators are investigated as on-chip high-efficiency antenna and as on-chip high-Q resonator. A dielectric sphere of alumina ceramic is precisely placed atop the semiconductor in a shallow crate etched into the back-end-of-line dielectric layers on the chip surface. The sphere resonates in a higher-order mode, efficiently coupled to the on-chip planar microstrip excitation structure. For sphere diameter of 1.1 mm, an antenna with gain of 5.1 dBi and efficiency of 33% is demonstrated at 100 GHz. For a sphere diameter of 1 mm, a resonator is demonstrated with measured loaded Q-factor of 143 at 103 GHz.

Details

OriginalspracheEnglisch
Titel2022 Asia-Pacific Microwave Conference (APMC)
Herausgeber (Verlag)IEEE
Seiten686-688
Seitenumfang3
ISBN (elektronisch)9784902339567
ISBN (Print)978-1-6654-5108-6
PublikationsstatusVeröffentlicht - 2 Dez. 2022
Peer-Review-StatusJa

Konferenz

Titel2022 Asia-Pacific Microwave Conference, APMC 2022
Dauer29 November - 2 Dezember 2022
OrtYokohama, Japan
StadtYokohama
LandJapan

Externe IDs

Scopus 85146662715

Schlagworte

Schlagwörter

  • Antenna measurements, Dielectric resonator antennas, Microwave antennas, Millimeter wave measurements, Q-factor, Semiconductor device measurement, System-on-chip