Self-Aligned on-Chip Spherical Dielectric Resonators and Antennas for SiGe MMIC
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Spherical dielectric resonators are investigated as on-chip high-efficiency antenna and as on-chip high-Q resonator. A dielectric sphere of alumina ceramic is precisely placed atop the semiconductor in a shallow crate etched into the back-end-of-line dielectric layers on the chip surface. The sphere resonates in a higher-order mode, efficiently coupled to the on-chip planar microstrip excitation structure. For sphere diameter of 1.1 mm, an antenna with gain of 5.1 dBi and efficiency of 33% is demonstrated at 100 GHz. For a sphere diameter of 1 mm, a resonator is demonstrated with measured loaded Q-factor of 143 at 103 GHz.
Details
Originalsprache | Englisch |
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Titel | 2022 Asia-Pacific Microwave Conference (APMC) |
Herausgeber (Verlag) | IEEE |
Seiten | 686-688 |
Seitenumfang | 3 |
ISBN (elektronisch) | 9784902339567 |
ISBN (Print) | 978-1-6654-5108-6 |
Publikationsstatus | Veröffentlicht - 2 Dez. 2022 |
Peer-Review-Status | Ja |
Konferenz
Titel | 2022 Asia-Pacific Microwave Conference (APMC) |
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Dauer | 29 November - 2 Dezember 2022 |
Ort | Yokohama, Japan |
Externe IDs
Scopus | 85146662715 |
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Schlagworte
Schlagwörter
- Antenna measurements, Dielectric resonator antennas, Microwave antennas, Millimeter wave measurements, Q-factor, Semiconductor device measurement, System-on-chip