Secondary electron emission from gold microparticles in a transmission electron microscope: comparison of Monte Carlo simulations with experimental results

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Wen Feng - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Johannes Schultz - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Daniel Wolf - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Sergii Pylypenko - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Thomas Gemming - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Kristina Weinel - , CEOS- Endowed Chair of Electron Optics (with IFW), Leibniz Institute for Solid State and Materials Research Dresden, Federal Institute for Materials Research and Testing Berlin (Author)
  • Leonardo Agudo Jácome - , Federal Institute for Materials Research and Testing Berlin (Author)
  • Bernd Büchner - , Chair of Experimental Solid State Physics, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Axel Lubk - , CEOS- Endowed Chair of Electron Optics (with IFW), Leibniz Institute for Solid State and Materials Research Dresden (Author)

Abstract

We measure the electron beam-induced current to analyze the electron-induced secondary electron (SE) emission from micron-sized gold particles illuminated by 80 and 300 keV electrons in a transmission electron microscope. A direct comparison of the experimental and simulated SE emission (SEE) employing Monte Carlo scattering simulations based on the GEANT4 toolkit yields overall good agreement with a noticeable discrepancy arising from the shortcoming of the GEANT4 scattering cross sections in the low-loss regime. Thus, the electron beam-induced current analysis allows to quantify the inelastic scattering including SEE in the transmission electron microscope and provides further insight into the charging mechanisms.

Details

Original languageEnglish
Article number085102
JournalJournal of Physics D: Applied Physics
Volume58
Issue number8
Publication statusPublished - 24 Feb 2025
Peer-reviewedYes

Keywords

Keywords

  • electron beam-induced current, Geant4, secondary electron emission, secondary electron yield, transmission electron microscopy