Secondary electron emission from gold microparticles in a transmission electron microscope: comparison of Monte Carlo simulations with experimental results
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
We measure the electron beam-induced current to analyze the electron-induced secondary electron (SE) emission from micron-sized gold particles illuminated by 80 and 300 keV electrons in a transmission electron microscope. A direct comparison of the experimental and simulated SE emission (SEE) employing Monte Carlo scattering simulations based on the GEANT4 toolkit yields overall good agreement with a noticeable discrepancy arising from the shortcoming of the GEANT4 scattering cross sections in the low-loss regime. Thus, the electron beam-induced current analysis allows to quantify the inelastic scattering including SEE in the transmission electron microscope and provides further insight into the charging mechanisms.
Details
| Original language | English |
|---|---|
| Article number | 085102 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 58 |
| Issue number | 8 |
| Publication status | Published - 24 Feb 2025 |
| Peer-reviewed | Yes |
Keywords
ASJC Scopus subject areas
Keywords
- electron beam-induced current, Geant4, secondary electron emission, secondary electron yield, transmission electron microscopy