Secondary electron emission from gold microparticles in a transmission electron microscope: comparison of Monte Carlo simulations with experimental results
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
We measure the electron beam-induced current to analyze the electron-induced secondary electron (SE) emission from micron-sized gold particles illuminated by 80 and 300 keV electrons in a transmission electron microscope. A direct comparison of the experimental and simulated SE emission (SEE) employing Monte Carlo scattering simulations based on the GEANT4 toolkit yields overall good agreement with a noticeable discrepancy arising from the shortcoming of the GEANT4 scattering cross sections in the low-loss regime. Thus, the electron beam-induced current analysis allows to quantify the inelastic scattering including SEE in the transmission electron microscope and provides further insight into the charging mechanisms.
Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 085102 |
| Fachzeitschrift | Journal of Physics D: Applied Physics |
| Jahrgang | 58 |
| Ausgabenummer | 8 |
| Publikationsstatus | Veröffentlicht - 24 Feb. 2025 |
| Peer-Review-Status | Ja |
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- electron beam-induced current, Geant4, secondary electron emission, secondary electron yield, transmission electron microscopy