Retention characteristics of Hf0.5Zr0.5O2-based ferroelectric tunnel junctions

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

Abstract

We report on the retention properties of double-layer hafnium zirconium oxide (Hf0.5Zr0.5O2; HZO) based ferroelectric tunnel junctions (FTJ). Utilizing HZO as the ferroelectric layer and aluminum oxide (Al2O3) as the tunneling barrier a scalable FTJ memory operation with good endurance and an on/off ratio of about 10 was achieved. Due to inherent depolarization fields from the double layer structure, the device suffers from strong retention loss over time. An extrapolation to 10 years at room temperature shows vanishing differences between the on and off state currents. We propose a way to avert this retention loss by using a constant bias that can be built-in by a work function difference from the metal electrode. This leads to more stable on-current retention and only small off-current increase, giving rise to an improved retention behavior of the FTJ.

Details

Original languageEnglish
Title of host publication2019 IEEE 11th International Memory Workshop (IMW)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
ISBN (electronic)978-1-7281-0981-7, 978-1-7281-0980-0
ISBN (print)978-1-7281-0982-4
Publication statusPublished - May 2019
Peer-reviewedYes

Publication series

SeriesIEEE International Memory Workshop (IMW)
ISSN2330-7978

Workshop

Title11th IEEE International Memory Workshop
Abbreviated titleIMW 2019
Conference number11
Duration12 - 15 May 2019
Degree of recognitionInternational event
LocationHyatt Hotel Monterey
CityMontterey
CountryUnited States of America

External IDs

ORCID /0000-0003-3814-0378/work/142256266

Keywords

Keywords

  • ferroelectric tunnel junction, HfZrO, memory, retention