Recursive Identification of Micropositioning Stage Based on Sandwich Model with Hysteresis

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Ruili Dong - , Shanghai Normal University (Author)
  • Yonghong Tan - , Shanghai Normal University (Author)
  • Yangqiu Xie - , Guangxi University (Author)
  • Klaus Janschek - , Chair of Automation Engineering, TUD Dresden University of Technology (Author)

Abstract

In this brief, a recursive identification method for a micropositioning stage with piezo actuators is proposed. This method utilizes a sandwich model for describing nonlinear dynamics of the stage. In this model, both power amplifier with filtering circuit and the flexure hinge with load are described by linear dynamic submodels, respectively, whereas a Duhem hysteresis submodel is employed for describing the performance of the piezo actuator. An extended recursive identification algorithm is proposed for estimating the corresponding parameters of the sandwich model, and the convergence of the proposed algorithm is analyzed. Finally, the experimental results of a real positioning stage with piezo actuators are presented and discussed.

Details

Original languageEnglish
Article number7448437
Pages (from-to)317-325
Number of pages9
JournalIEEE transactions on control systems technology
Volume25
Issue number1
Publication statusPublished - Jan 2017
Peer-reviewedYes

Keywords

Keywords

  • Hysteresis, identification, piezoelectric actuator, positioning stage, sandwich model