Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

Broadband tuning of MIR-infrared radiation from 3 to 10 µm (1000 to 3200 wavenumbers) is a very promising way for spectroscopic study of gaseous, liquid, or solid species or intermixtures. We report a new quasi-static micro-optical-electrical-mechanic (MOEMS) grating for spectral tuning of an IR light source based on a quantum cascade laser. This concept unites the advantages of broadband sources with the advantages of coherent laser sources in a miniaturized setup. In contrary to resonant MOEMS device, the quasi-static driving principle allows the scanning with arbitrary trajectories and velocity and thus with potential higher spectral resolution. To stabilize the trajectory the MOEMS device is controlled by integrated position sensors. We report the dynamical characteristics of MOEMS micro-mirror with integrated diffraction grating and experimental results of the tuning of a QCL in the wavelength range from 4150 to 4600 nm.
Translated title of the contribution
Quasi-static MOEMS grating scanner for spectral tuning of a MIR quantum cascade laser

Details

Original languageGerman
Pages (from-to)131-143
Journal Technisches Messen : tm ; Sensoren, Geräte, Systeme
Volume86
Issue number3
Publication statusPublished - Mar 2019
Peer-reviewedYes

External IDs

Scopus 85062449680
ORCID /0000-0003-3259-4571/work/142249652

Keywords

Keywords

  • IR spectroscopy, quantum cascade laser, MOEMS scanner, micro-mirror, diffraction grating