Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Broadband tuning of MIR-infrared radiation from 3 to 10 µm (1000 to 3200 wavenumbers) is a very promising way for spectroscopic study of gaseous, liquid, or solid species or intermixtures. We report a new quasi-static micro-optical-electrical-mechanic (MOEMS) grating for spectral tuning of an IR light source based on a quantum cascade laser. This concept unites the advantages of broadband sources with the advantages of coherent laser sources in a miniaturized setup. In contrary to resonant MOEMS device, the quasi-static driving principle allows the scanning with arbitrary trajectories and velocity and thus with potential higher spectral resolution. To stabilize the trajectory the MOEMS device is controlled by integrated position sensors. We report the dynamical characteristics of MOEMS micro-mirror with integrated diffraction grating and experimental results of the tuning of a QCL in the wavelength range from 4150 to 4600 nm.
Translated title of the contribution | Quasi-static MOEMS grating scanner for spectral tuning of a MIR quantum cascade laser |
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Details
Original language | German |
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Pages (from-to) | 131-143 |
Journal | Technisches Messen : tm ; Sensoren, Geräte, Systeme |
Volume | 86 |
Issue number | 3 |
Publication status | Published - Mar 2019 |
Peer-reviewed | Yes |
External IDs
Scopus | 85062449680 |
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ORCID | /0000-0003-3259-4571/work/142249652 |
Keywords
Keywords
- IR spectroscopy, quantum cascade laser, MOEMS scanner, micro-mirror, diffraction grating