Pursuing the Increase of Factory Automation in 200mm Frontend Manufacturing to Manage the Changes Imposed by the Transition from High-Volume Low-Mix to High-Mix Low-Volume Production
Research output: Contribution to conferences › Paper › Contributed › peer-review
Contributors
Details
| Original language | English |
|---|---|
| Pages | 148-155 |
| Number of pages | 8 |
| Publication status | Published - 2008 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 49149107481 |
|---|---|
| ORCID | /0000-0001-6942-3763/work/142252804 |