Pursuing the Increase of Factory Automation in 200mm Frontend Manufacturing to Manage the Changes Imposed by the Transition from High-Volume Low-Mix to High-Mix Low-Volume Production

Research output: Contribution to conferencesPaperContributedpeer-review

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Details

Original languageEnglish
Pages148-155
Number of pages8
Publication statusPublished - 2008
Peer-reviewedYes

External IDs

Scopus 49149107481
ORCID /0000-0001-6942-3763/work/142252804

Keywords